New JEOL MultiBeam SEM/FIB for Simultaneous Micro Milling and High Resolution SEM Imaging
November 27, 2007, Peabody, Mass. — JEOL USA introduces a new high throughput SEM/FIB that combines Focused Ion Beam micro milling with the high resolution imaging of the JEOL LaB6 electron column. The MultiBeam is a high-productivity tool for IC defect analysis, circuit modification, TEM thin film sample preparation, and mask repair. A versatile all-in-one... Read more