The all-in-one analyzer for FOUP, fab and clean-room environment AMC monitoring
IONICON Analytik, the Austrian based leading manufacturer of real-time trace VOC analyzers, introduces a new modular and flexible platform for airborne molecular contamination (AMC) monitoring in typical semiconductor applications such as:
FOUP analysis for AMC with a focus on VOC and condensables incl. full integration with the Pfeiffer Vacuum APA 302 pod analyzer.
Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system, directly in the fab at variable locations and even at the tool-level.
Monitoring of outside and intake air: automated fence line monitoring incl. alarm levels, up- and downstream filter testing.
AMC-Monitor T-1000
This comprehensive monitoring solution is now based on IONICON’s renowned PTR-TOFMS series bundled with the new “AME” analysis software. The Automated Measurement and Evaluation (AME) suite offers pre-set recipes for the specific monitoring challenges. The analyzer will scan automatically, identify target substances in the data and visualize the concentration of the selected AMC in real-time. An intelligent pattern matching algorithm provides accurate quantitative information of the identified contaminants, even in complex measurement environments.
The AMC-Monitor T-1000 enables the automated quantification of several hundred substances in real-time. Using the innovative PTR-TOF technology, all detectable compounds are analyzed simultaneously, with high sensitivity, and very low detection limits of < 1 pptv.
The IONICON experts with their extensive experience in analytical chemistry provide pre-set recipes to choose from for the analysis of target species according to the particular foundry’s or tool manufacturer’s need, covering relevant chemicals present.
A scalable built-in multiplexing system minimizes analysis costs per sampling point. Remote operation and data transmission via Modbus TCP allows for integration into industrial systems. It is available as stand-alone instrument or fully integrated with the Pfeiffer Vacuum APA 302 FOUP analyzer. The AMC-Monitor is a cost-effective all-in-one solution for today and future VOC monitoring requirements.
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About IONICON
IONICON is the world’s leading manufacturer of real-time trace gas analyzers for low concentration volatile organic compounds (VOCs) monitoring, based on the unique Proton Transfer Reaction – Mass Spectrometry (PTR-MS) technology, since 1998.
The main scientific application areas include atmospheric chemistry, environmental research, exhaust analysis, food and flavor science, illicit substances detection and breath gas analysis.
In addition to laboratory instruments, IONICON also produces specialized VOC monitoring systems for industrial applications such as the semiconductor industry or for field deployment. A strong technical background allows the company to build its own time-of-flight mass spectrometers, sampling and calibration systems for its analyzers, fast gas-chromatography and auto-sampling modules incl. various multiplexing set-ups.
IONICON hosts an application lab at its headquarters in Innsbruck, Austria offering analytical services to its customers, from initial sample tests to long-term studies.
In 2016, the company celebrated its 300th sold PTR-MS instrument.
Learn more about IONICON here.
Resources
AMC-Monitor T-1000 Product Website: http://www.ionicon.com/product/custom-builtsolutions/amc-monitor
AMC-Monitor T-1000 Product Picture. (Source: IONICON; Suggested caption: The new IONICON AMC-Monitor T-1000 all-in-one analyzer for FOUP, fab and clean-room environment AMC monitoring) http://www.ionicon.com/sites/default/files/uploads/images/AMC-Monitor_T-1000.jpg
Contact:
IONICON Analytik GmbH
Lukas Märk, CEO
Eduard-Bodem-Gasse 3,
6020 Innsbruck Austria
Tel: +43 512 214 800
Mail: info@ionicon.com
Web: www.ionicon.com – blog.ionicon.com