New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities
FOR IMMEDIATE RELEASE CONTACT:Patricia Corkum, Marketing Manager978-536-2273 • pcorkum@jeol.com • www.jeolusa.com May 5, 2015 – Peabody, MA — A state-of-the-art JEOL e-beam lithography system will soon be a new resource for quantum information science researchers that utilize the cutting-edge facilities at the University of Waterloo Quantum NanoFab in Waterloo, Ontario. The JEOL JBX-6300FS e-beam system will... Read more