Unique Mass Spectrometer for Analysis of Semiconductor Process Gases
June 15, 2017, Peabody, Mass. — The JEOL InfiTOF compact high-resolution gas analysis mass spectrometer is ideal for monitoring trace impurities in semiconductor process gases, evolved gases from catalytic reactions, vapor epitaxy and more. No larger than a desktop PC, the InfiTOF instantly separates isobaric gases such CO and N2, or N2O and CO2, for... Read more