Hitachi High-Technologies Develops Enhanced Microwave ECR Etching Module
Achieves Damage-Free Atomic-Level Etching with a Wide Range of Optional Functions Conductor Etch System 9000-Series (Photo: Business Wire) March 22, 2018 01:00 AM Pacific Daylight Time TOKYO–(BUSINESS WIRE)–Hitachi High-Technologies Corporation (TSE: 8036) (Hitachi High-Tech) announced the development of the Enhanced Microwave ECR*1 Etching Module (the “Module”), a new product designed for next-generation semiconductor device manufacturing processes.... Read more